Micro Electro Mechanical Systems | Impotent  Questions
EE6007 Micro Electro Mechanical Systems Syllabus	Click Here to Download
EE6007 Micro Electro Mechanical Systems Part A Important Questions	Click Here to Download
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EE6007 Micro Electro Mechanical Systems Question Bank	Click Here to Download
EE6007 Micro Electro Mechanical Systems Full Study Material	Click Here to Download
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UNIT I INTRODUCTION                  9 

Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication – Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS –Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

UNIT II SENSORS AND ACTUATORS-I                    9 

Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices –Micro Grippers – Micro Motors – Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph – Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys

UNIT III SENSORS AND ACTUATORS-II                     9 

Piezoresistive sensors – Piezoresistive sensor materials – Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials –Applications to Inertia , Acoustic, Tactile and Flow sensors.

UNIT IV MICROMACHINING                                       9 

Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies – Basic surface micro machining processes –Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process -Assembly of 3D MEMS – Foundry process.

UNIT V POLYMER AND OPTICAL MEMS                     9 

Polymers in MEMS– Polimide – SU-8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon -Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.

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EE6007 Micro Electro Mechanical Systems Notes – Click here to Download 

EE6007 Micro Electro Mechanical Systems Questions Papers – Click here to Download 

EE6007 Micro Electro Mechanical Systems 2 marks with answers – Click here to Download 

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